Show 5 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: "802000244354" cql: classification exact A1 Add to list Journal Article A1 Computer modelling of magnetron discharges Annemie Bogaerts, Evi Bultinck, Ivan Kolev, Laurent Schwaederlé, Koen Van Aeken (UGent) , Guy Buyle and Diederik Depla (UGent) (2009) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 42. Add to list Journal Article A1 The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation Koen Van Aeken (UGent) , Stijn Mahieu (UGent) and Diederik Depla (UGent) (2008) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 41(20). Add to list Journal Article A1 Dependence of the sticking coefficient of sputtered atoms on the target-substrate distance Stijn Mahieu (UGent) , Koen Van Aeken (UGent) , Diederik Depla (UGent) , D SMEETS and A VANTOMME (2008) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 41(15). Add to list Journal Article A1 Quantification of the ion and momentum fluxes toward the substrate during reactive magnetron sputtering Stijn Mahieu (UGent) , Koen Van Aeken (UGent) and Diederik Depla (UGent) (2008) Journal of applied physics. 104(11). ← Previous 1 2