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High-k dielectrics for future generation memory devices (Invited Paper)
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Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry
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Highly efficient grating coupler between optical fiber and silicon photonic circuit
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- Conference Paper
- C1
- open access
Demonstration of optical via and low-loss optical crossing for vertical integration Of silicon photonic circuits
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- Conference Paper
- C1
- open access
Low loss amorphous silicon photonic wire and ring resonator fabricated by CMOS process
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- Conference Paper
- C1
- open access
Deposited silicon-on-insulator material technology for photonic integrated circuitry
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- Conference Paper
- C1
- open access
Polycrystalline silicon as waveguide material for advanced photonic
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Plasma-enhanced chemical vapour deposition growth of Si nanowires with low melting point metal catalysts: an effective alternative to Au-mediated growth
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Quantitative analysis of trace metals in silicon nitride films by a vapor phase decomposition/solution collection approach
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CD control using SiON BARL processing for sub-0.25 mu m lithography