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Texture of NiSi films on Si(001), (111), and (110) substrates
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Effect of Pt addition on growth stress and thermal stress of NiSi films
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Study of metal-related deep-level defects in germanide Schottky barriers on n-type germanium
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- Journal Article
- A1
- open access
Thin film solid-state reactions forming carbides as contact materials for carbon-containing semiconductors
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Plasma-enhanced chemical vapour deposition growth of Si nanowires with low melting point metal catalysts: an effective alternative to Au-mediated growth
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Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully silicided gate applications
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Growth of pinhole-free ytterbium silicide film by solid-state reaction on Si(001) with a thin amorphous Si interlayer
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Atomic layer deposition of TiO2 from tetrakis-dimethyl-amido titanium or Ti isopropoxide precursors and H2O
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Effect of Pt addition on the stress of NiSi film formed on Si(100).
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Characterization of the texture of silicide films using electron backscattered diffraction