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Influence of the target-substrate distance on the growth of YSZ thin films
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Yttria-stabilized zirconia thin films as oxygen ion conductor for solid oxide fuel cells
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Deposition of thin films by sputtering cold isostatically pressed powder targets: a case study
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Magnetron sputter deposition as visualized by Monte Carlo modeling
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Smart textiles: an explorative study of the use of magnetron sputter deposition
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Fundamental aspects of home made targets for magnetron sputtering