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On the role of chemisorption in the formation of the target surface compound layer during reactive magnetron sputtering
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Most efficient mesoporous Mn/Ga-PCH catalyst for low-temperature selective catalytic reduction of NO with C3H6
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Sputter deposition with powder targets : an overview
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Thermal stability of Zr-O-N(:Ti) thin films prepared by magnetron sputtering
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Effect of processing parameters on the deposition of SiOx-like coatings on the surface of polypropylene films using glow discharge plasma assisted polymerization for tissue engineering applications
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The influence of the pressure on the microstructure of yttria-stabilized zirconia thin films deposited by dual magnetron sputtering
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Comparison of low-pressure DC glow discharge and dielectric barrier discharge in CO2-laser mixture by optical emission spectroscopy
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Destruction of toxic organic compounds in a plasmachemical reactor
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Qualitative model of the magnetron discharge
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Influence of the target composition on reactively sputtered titanium oxide films