Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters" Add to list Conference Paper C1 open access Dissection of the Planar Magnetron Discharge Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER (2003) Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters.