Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Society of Vacuum Coaters Technical Conference Proceedings 1991-2005" Add to list Conference Paper C1 Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons G BUYLE, Diederik Depla (UGent) , Karin Eufinger (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER (2005) Society of Vacuum Coaters Technical Conference Proceedings 1991-2005.