Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Science and Application of Thin Films, Conference abstracts" Add to list Conference Paper C3 open access Characterization of advanced k1.9, 2.0 and 2.2 ultra-porous SiOC(H) films deposited by plasma-enhanced chemical vapor deposition M Rhedzeb, S Armini, K Vanstreels, M Baklanov and Pascal Van Der Voort (UGent) (2014) Science and Application of Thin Films, Conference abstracts.