Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022" Add to list Conference Paper P1 open access Programmable silicon photonic circuits powered by MEMS Wim Bogaerts (UGent) , Alain Yuji Takabayashi, Pierre Edinger, Gaehun Jo, Iman Zand (UGent) , Peter Verheyen, Moises Jezzini, Hamed Sattari, Giuseppe Talli, Cleitus Antony, et al. (2022) SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022. In Proceedings of SPIE 12005.