Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Metrology, Inspection, and Process Control XXXVIII" Add to list Conference Paper P1 open access Soft x-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures Richard Ciesielski, Roger Loo (UGent) , Yosuke Shimura, Janusz Bogdanowicz, Antonio Mani, Christoph Mitterbauer, Vinh-Binh Truong, Michael Kolbe and Victor Soltwisch (2024) METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII. In Proceedings of SPIE 12955. Add to list Conference Paper P1 Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications Matteo Beggiato, Dorin Cerbu, Roger Loo (UGent) , Wei Sun, Alain Moussa, Gerhard Bast, Kaoru Fukaya, Christophe Beral, Anne-Laure Charley, Nachiketa Janardan, et al. (2024) Metrology, Inspection, and Process Control XXXVIII. In Proceedings of SPIE 12955. Add to list Conference Paper P1 open access Towards improved semiconductor defect inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS Ying-Lin Chen, Jacob Deforce, Vic De Ridder, Bappaditya Dey, Victor M. Blanco Carballo, Sandip Halder and Philippe Leray (2024) METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII. In Proceedings of SPIE 12955.