Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Magnetron, Ion processing and Arc Technologies European conference, Abstracts" Add to list Conference Paper C3 In search for the limits of rotating cylindrical magnetron sputtering Wouter Leroy (UGent) , Stijn Mahieu (UGent) , Roger De Gryse (UGent) and Diederik Depla (UGent) (2010) Magnetron, Ion processing and Arc Technologies European conference, Abstracts.