Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Journal of Electrochemical Society" Add to list Journal Article A2 The kinetics of the low-pressure chemical vapor deposition of polycrystalline silicon from silane WLM WEERTS, M DE CROON and Guy Marin (UGent) (1998) Journal of Electrochemical Society. 145(4). p.1318-1330