Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST" Add to list Conference Paper P1 0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications N Menou, XP Wang, B Kaczer, W Polspoel, M Popovici, K Opsomer, MA Pawlak, Werner Knaepen (UGent) , Christophe Detavernier (UGent) , T Blomberg, et al. (2008) IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST. In International Electron Devices Meeting p.929-932