Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Save this search Download search results Subscribe to news feed Your filters: cql: parent exact "GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XI" Add to list Journal Article A1 DLTS study on deep levels formed in plasma hydrogenated and subsequently annealed silicon YL HUANG, E SIMOEN, C CLAEYS, R JOB, Y MA, W DUNGEN, WR FAHRNER, Jorg Versluys and Paul Clauws (UGent) (2005) GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XI. 108-109. p.547-552 Add to list Journal Article A1 Recent progress in understanding of lattice defects in Czochralski-grown germanium: catching-up with silicon Jan Vanhellemont (UGent) , S HENS, Johan Lauwaert (UGent) , O DE GRYSE, Piet Vanmeerbeek, Dirk Poelman (UGent) , P SPIEWAK, I ROMANDIC, Antoon Theuwis and Paul Clauws (UGent) (2005) GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XI. 108-109. p.683-690