Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Save this search Download search results Subscribe to news feed Your filters: cql: parent exact "Fourth international workshop on micro and nanotechnology for power generation and ... Add to list Conference Paper C1 Novel design and fabrication of a MEMS electrostatic vibration scavenger Tom Sterken (UGent) , Paolo Fiorini, Kris Baert, Gustaaf Borghs and Robert Puers (2004) Fourth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2004). p.18-21