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Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt₃)-precursor and NH₃-plasma
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ALD deposition of Fe2O3 doped SnO2 as conversion anode for Li-ion batteries
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- Conference Paper
- C3
- open access
A new look on ALD vanadium oxides for 3D thin-film lithium-ion batteries
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- Conference Paper
- C3
- open access
3D Monte Carlo model for simulation of ALD on complex substrates
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- Conference Paper
- C3
- open access
Oxidation barrier for Cu and Fe powder by atomic layer deposition
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In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate
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Plasma enhanced atomic layer deposition of aluminium sulphide
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PE-ALD of lithium aluminum silicon oxide solid electrolyte layers using LiHMDS