Ghent University Academic Bibliography

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Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium

Sofie Vandenbroucke (UGent) , Elisabeth Levrau, Matthias Minjauw (UGent) , Kevin Van de Kerckhove, Kilian Devloo-Casier (UGent) , Sreeprasanth Pulinthanathu Sree, Johan A Martens, Rita Vos, Karolien Jans, Jolien Dendooven (UGent) , et al.

(2019) EuroCVD 22 - Baltic ALD 16, Conference abstracts.
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Atomic layer deposition of localised boron- and hydrogen-doped aluminium oxide using trimethyl borate as a dopant precursor

Felix Mattelaer (UGent) , Michiel Van Daele, Matthias Minjauw (UGent) , Timo Sajavaara, Jolien Dendooven (UGent) and Christophe Detavernier (UGent)

(2019) EuroCVD 22 - Baltic ALD 16, Conference abstracts.
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Near room temperature plasma enhanced atomic layer deposition of gold metal

Michiel Van Daele, Matthew BE Griffiths, Ali Raza, Matthias Minjauw (UGent) , Seán T Barry, Roel Baets (UGent) , Christophe Detavernier (UGent) and Jolien Dendooven (UGent)

(2019) EuroCVD 22 - Baltic ALD 16, Conference abstracts.
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- Conference Paper
- C3
- open access
Cost-reducing PE-ALD processes for pure and doped SiO2 thin films

Geert Rampelberg (UGent) , Véronique Cremers (UGent) , Andreas Werbrouck (UGent) , Jolien Dendooven (UGent) and Christophe Detavernier (UGent)

(2019) EuroCVD 22 - Baltic ALD 16, Conference abstracts.
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- Conference Paper
- C3
- open access
Stabilizing red fluoride phosphors for white LEDs using atomic layer deposition

Reinert Verstraete, Hannes Rijckaert (UGent) , Geert Rampelberg (UGent) , Elizabeth Coetsee, Mart-Mari Duvenhage, Christophe Detavernier (UGent) , Hendrik Swart, Philippe Smet (UGent) and Dirk Poelman (UGent)

(2019) EuroCVD 22 - Baltic ALD 16, Conference abstracts.
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- Conference Paper
- C3
- open access
Time-resolved in-situ mass spectrometry for monitoring and identifying reaction products in ALD processes

Andreas Werbrouck (UGent) , Felix Mattelaer (UGent) , Jolien Dendooven (UGent) and Christophe Detavernier (UGent)

(2019) EuroCVD 22 - Baltic ALD 16, Conference abstracts.

Academic Bibliography

Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium

Atomic layer deposition of localised boron- and hydrogen-doped aluminium oxide using trimethyl borate as a dopant precursor

Near room temperature plasma enhanced atomic layer deposition of gold metal

Cost-reducing PE-ALD processes for pure and doped SiO2 thin films

Stabilizing red fluoride phosphors for white LEDs using atomic layer deposition

Time-resolved in-situ mass spectrometry for monitoring and identifying reaction products in ALD processes

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