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Source/drain epitaxy and contact silicides for CFET applications
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- Conference Paper
- C3
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Epitaxial SiGe/Si multi-stacks : stacked nano-sheet to fork-sheet and CFET devices
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Every step counts : importance of final ALD sequences for oxygen evolution reaction catalysts
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- Conference Paper
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Atomic layer deposition of lithium borate and borophosphate thin films for lithium-ion battery applications
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Material selection for fundamental investigation of high temperature processes in lithium-ion cathode production
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- Conference Paper
- C3
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Atomic layer deposition of metal phosphates
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- Conference Paper
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Titanium carboxylate molecular layer deposited hybrid films as protective coatings for lithium-ion batteries
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Atomic layer deposition of ruthenium dioxide thin films using RuO4 and alcohols as reactants
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- Conference Paper
- C3
- open access
Plasma enhanced atomic layer deposition of nickel and cobat phoshpate for lithium ion batteries
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Impact of atomic layer deposition on the photoluminescence of colloidal quantum dots