Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Atomic Layer Deposition, 12th International conference, Abstract book" Add to list Conference Paper C3 open access Comparison of three processes for plasma-enhanced ALD of platinum Delphine Longrie (UGent) , Kilian Devloo-Casier (UGent) , Sven Van den Berghe, Kris Driesen and Christophe Detavernier (UGent) (2012) Atomic Layer Deposition, 12th International conference, Abstract book. Add to list Conference Paper C3 open access A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects Delphine Longrie (UGent) , Kilian Devloo-Casier (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent) (2012) Atomic Layer Deposition, 12th International conference, Abstract book.