Show 20 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Atomic Layer Deposition, 10th International conference, Abstracts" Add to list Conference Paper C3 open access Conformality of Al2O3 deposited by thermal, plasma-enhanced and ozone-based atomic layer deposition Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Jan Musschoot and Christophe Detavernier (UGent) (2010) Atomic Layer Deposition, 10th International conference, Abstracts. Add to list Conference Paper C3 open access In situ x-ray fluorescence measurements during ALD on flat substrates and in nanoporous Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Sreeprasanth Pulinthanathu Sree, Tamás I Korányi, Gina Vanbutsele, Johan A Martens, Karl F Ludwig and Christophe Detavernier (UGent) (2010) Atomic Layer Deposition, 10th International conference, Abstracts.