Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "AVS 22th International Conference on Atomic Layer Deposition (ALD 2022), Abstracts" Add to list Conference Paper C3 Ruthenium nanostructures via sequential infiltration synthesis in self-assembled diblock copolymer thin films Nithin Poonkottil (UGent) , Eduardo Solano Minuesa (UGent) , Arbresha Muriqi, Michael Nolan, Christophe Detavernier (UGent) and Jolien Dendooven (UGent) (2022) AVS 22th International Conference on Atomic Layer Deposition (ALD 2022), Abstracts.