Show
Sort by
-
- Conference Paper
- C3
- open access
Atomic Layer Deposition of Ru-containing materials using RuO4 as both the co-reactant and the metal source
-
- Conference Paper
- C3
- open access
Atomic layer deposition of yttrium oxide films and their properties of water wettability
-
- Conference Paper
- C3
- open access
Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
-
- Conference Paper
- C3
- open access
Design of Li-containing layers with LiHMDS
-
- Conference Paper
- C3
- open access
Nitrogen doping of Al- and Ti-phosphate through plasma-enhanced ALD
-
- Conference Paper
- C3
- open access
Photocatalytic lithography with atomic layer deposited TiO2 films to tailor biointerface properties
-
- Conference Paper
- C3
- open access
The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulation
-
- Conference Paper
- C3
- open access
Visualizing the nucleation of ALD on polymers
-
- Conference Paper
- C3
- open access
ALD encapsulation of QD-polymer composite films for luminescent applications