Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerqu... Add to list Conference Paper C1 Uniformity Control in Sputter Deposition Processes. W DE BOSSCHER, Anja Blondeel and Guy Buyle (2002) 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.. p.135-141 Add to list Conference Paper C1 Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds. Anneke Segers, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent) (2002) 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.. p.30-35 Add to list Conference Paper C1 Influence of recapture of secondary electrons on the magnetron sputtering deposition process. Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent) (2002) 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.. p.348-353