Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear... Add to list Conference Paper C1 Low pressure Behaviour of the sputter magnetron discharge Guy Buyle, Diederik Depla (UGent) , W DE BOSSCHER, Karin Eufinger (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent) (2002) 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -.