Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "wafer bonding" cql: author exact 802000464323 or (type exact bookEditor and editor exact 802000464323) Add to list Conference Paper C1 Electrostatic energy scavengers for wireless autonomous transducer solutions Geert Altena, Tom Sterken (UGent) , Paolo Fiorini, Ruud JM Vullers and Robert Puers (2006) Semiconductor Advances for Future Electronics and Sensors, Proceedings of the workshop. p.365-368 Add to list Conference Paper C1 Combining BCB with KOH : wet bulk micromachining versus wafer bonding Tom Sterken (UGent) , Paolo Fiorini and Robert Puers (2005) Micromachining, Micromechanics and Microsystems, 16th Workshop, Proceedings. p.80-83