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Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
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ALD-developed plasmonic two-dimensional Au-WO3-TiO2 heterojunction architectonics for design of photovoltaic devices
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Atomically-thin WO3/TiO2 heterojunction for supercapacitor electrodes developed by atomic layer deposition
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- Journal Article
- A1
- open access
Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition