Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "thermal-processing rtp" cql: author exact 002005108319 or (type exact bookEditor and editor exact 002005108319) Add to list Journal Article A1 Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers Geert Rampelberg (UGent) , Kilian Devloo-Casier (UGent) , Davy Deduytsche (UGent) , Marc Schaekers, Nicolas Blasco and Christophe Detavernier (UGent) (2013) APPLIED PHYSICS LETTERS. 102(11).