Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "tan" cql: author exact 001997337407 or (type exact bookEditor and editor exact 001997337407) Add to list Journal Article A1 TaCN growth with PDMAT and H-2/Ar plasma by plasma enhanced atomic layer deposition Qi Xie (UGent) , Davy Deduytsche (UGent) , Jan Musschoot, Roland Vanmeirhaeghe (UGent) , Christophe Detavernier (UGent) , Shao-Feng Ding and Xin-Ping Qu (2011) MICROELECTRONIC ENGINEERING. 88(5). p.646-650 Add to list Journal Article A1 Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N-2 or NH3 plasma Qi Xie, Jan Musschoot, Christophe Detavernier (UGent) , Davy Deduytsche (UGent) , Roland Van Meirhaeghe, Sven Van den Berghe, Yu-Long Jiang, Guo-Ping Ru, Bing-Zong Li and Xin-Ping Qu (2008) MICROELECTRONIC ENGINEERING. 85(10). p.2059-2063