Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "sputtering" cql: author exact 000080318020 or (type exact bookEditor and editor exact 000080318020) Add to list Conference Paper C3 On the target surface cleanness during magnetron sputtering Roeland Schelfhout (UGent) and Diederik Depla (UGent) (2015) Reactive Sputter Deposition, 14th International symposium, Abstracts.