Academic Bibliography

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Plasma-enhanced ALD : a route to hydrophilic, glueable PTFE

Geert Rampelberg (UGent) , Amit Kumar Roy (UGent) , Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Kilian Devloo-Casier (UGent) , Kim Ragaert (UGent) , Ludwig Cardon (UGent) and Christophe Detavernier (UGent)

(2016) Plasma Surface Engineering, 15th International conference, Abstracts.
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Plasma-enhanced ALD on particles and powders

Geert Rampelberg (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) and Christophe Detavernier (UGent)

(2016) Plasma Surface Engineering, 15th International conference, Abstracts.
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Thermal and plasma enhanced atomic layer deposition on powders and particles

Geert Rampelberg (UGent) , Véronique Cremers (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) and Christophe Detavernier (UGent)

(2016) Belgian Physical Society, General scientific meeting, Abstracts.
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Plasma enhanced atomic layer deposition on powders

Geert Rampelberg (UGent) and Christophe Detavernier (UGent)

(2014) ECS and SMEQ Joint international meeting, Abstracts.
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Plasma enhanced atomic layer deposition on powders

Geert Rampelberg (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) and Christophe Detavernier (UGent)

(2014) ECS Transactions. 64(9). p.51-62
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Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas

Delphine Longrie (UGent) , Kilian Devloo-Casier (UGent) , Davy Deduytsche (UGent) , Sven Van den Berghe, Kris Driesen and Christophe Detavernier (UGent)

(2012) ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 1(6). p.Q123-Q129
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Improved thermal stability and electrical performance by using PEALD ultrathin Al2O3 film with Ta as Cu diffusion barrier on low k dielectrics

Shao-Feng Ding, Qi Xie (UGent) , Fei Chen, Hai-Sheng Lu, Shaoren Deng (UGent) , Davy Deduytsche (UGent) , Christophe Detavernier (UGent) and Xin-Ping Qu

(2012) ECS SOLID STATE LETTERS. 1(3). p.P54-P56
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Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate

Jan Musschoot (UGent) , Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , G Buyle and Christophe Detavernier (UGent)

(2012) SURFACE & COATINGS TECHNOLOGY. 206(22). p.4511-4517
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Anisotropic atomic layer deposition profiles of TiO₂ in hierarchical silica material with multiple porosity

Sreeprasanth Pulinthanathu Sree, Jolien Dendooven (UGent) , Jasper Jammaer, Kasper Masschaele, Davy Deduytsche (UGent) , Jan D'Haen, Christine EA Kirschhock, Johan A Martens and Christophe Detavernier (UGent)

(2012) CHEMISTRY OF MATERIALS. 24(14). p.2775-2780

Academic Bibliography

Plasma-enhanced ALD : a route to hydrophilic, glueable PTFE

Plasma-enhanced ALD on particles and powders

Thermal and plasma enhanced atomic layer deposition on powders and particles

Plasma enhanced atomic layer deposition on powders

Plasma enhanced atomic layer deposition on powders

Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas

Improved thermal stability and electrical performance by using PEALD ultrathin Al2O3 film with Ta as Cu diffusion barrier on low k dielectrics

Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate

Anisotropic atomic layer deposition profiles of TiO₂ in hierarchical silica material with multiple porosity

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