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- 2016
- Plasma-enhanced ALD : a route to hydrophilic, glueable PTFE (
- Plasma-enhanced ALD on particles and powders (
- Thermal and plasma enhanced atomic layer deposition on powders and particles (
- 2014
- Plasma enhanced atomic layer deposition on powders (
- Plasma enhanced atomic layer deposition on powders (
- 2012
- Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas (
- Improved thermal stability and electrical performance by using PEALD ultrathin Al2O3 film with Ta as Cu diffusion barrier on low k dielectrics (
- Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate (
- Anisotropic atomic layer deposition profiles of TiO₂ in hierarchical silica material with multiple porosity (