Ghent University Academic Bibliography

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The role of backscattered neutrals on the phase composition of sputter deposited tungsten thin films

Farzaneh Ahangarani Farahani (UGent) , M. Akagawa, T. Shimizu and Diederik Depla (UGent)

(2026) APPLIED SURFACE SCIENCE. 718.
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- Journal Article
- A1
- open access
The measurement and impact of negative oxygen ions during reactive sputter deposition

Diederik Depla (UGent)

(2024) CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES. 49(4). p.718-753
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- open access
Linking simulated polycrystalline thin film microstructures to physical vapor deposition conditions

Joseph M. Monti, James A. Stewart, Joyce O. Custer, David P. Adams, Diederik Depla (UGent) and Rémi Dingreville

(2023) ACTA MATERIALIA. 245.
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On the influence of local oxygen addition on the growth of sputter deposited yttrium oxide thin films

Jinjiao Xia, Wenping Liang, Qiang Miao and Diederik Depla (UGent)

(2019) SURFACE & COATINGS TECHNOLOGY. 357. p.768-773
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The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films

Jinjiao Xia, Wenping Liang, Qiang Miao and Diederik Depla (UGent)

(2018) APPLIED SURFACE SCIENCE. 439. p.545-551
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Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films

Sigelinde Van Steenberge, Wouter Leroy (UGent) and Diederik Depla (UGent)

(2014) THIN SOLID FILMS. 553. p.2-6
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Reactive sputter deposition of Al doped TiOx thin films using titanium targets with aluminium inserts

Bert Braeckman (UGent) , Francis Boydens (UGent) , Diederik Depla (UGent) and Dirk Poelman (UGent)

(2013) JOURNAL OF ALLOYS AND COMPOUNDS. 578. p.44-49
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The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering

Francis Boydens (UGent) , Wouter Leroy (UGent) , Rosita Persoons and Diederik Depla (UGent)

(2013) THIN SOLID FILMS. 531. p.32-41
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Deposition of thin films by sputtering cold isostatically pressed powder targets: a case study

Francis Boydens (UGent) , Wouter Leroy (UGent) , Rosita Persoons and Diederik Depla (UGent)

(2012) PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. 209(3). p.524-530
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Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films

Jérika Lamas (UGent) , Wouter Leroy (UGent) and Diederik Depla (UGent)

(2012) THIN SOLID FILMS. 520(14). p.4782-4785

Academic Bibliography

The role of backscattered neutrals on the phase composition of sputter deposited tungsten thin films

The measurement and impact of negative oxygen ions during reactive sputter deposition

Linking simulated polycrystalline thin film microstructures to physical vapor deposition conditions

On the influence of local oxygen addition on the growth of sputter deposited yttrium oxide thin films

The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films

Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films

Reactive sputter deposition of Al doped TiOx thin films using titanium targets with aluminium inserts

The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering

Deposition of thin films by sputtering cold isostatically pressed powder targets: a case study

Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films

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