Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "magnetron discharge" Add to list Journal Article A1 Deposition of thin films by sputtering cold isostatically pressed powder targets: a case study Francis Boydens (UGent) , Wouter Leroy (UGent) , Rosita Persoons and Diederik Depla (UGent) (2012) PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. 209(3). p.524-530 Add to list Journal Article A1 Simplified model for the DC planar magnetron discharge Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , W De Bosscher and Roger De Gryse (UGent) (2004) VACUUM. 74(3-4). p.353-358 Add to list Journal Article A1 Dynamic Monte Carlo simulation for reactive sputtering of aluminium ZY Chen, A Bogaerts, Diederik Depla (UGent) and V Ignatova (2003) NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. 207(4). p.415-423