Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "ions" cql: author exact 002002050290 or (type exact bookEditor and editor exact 002002050290) Add to list Journal Article A1 open access The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering Francis Boydens (UGent) , Wouter Leroy (UGent) , Rosita Persoons and Diederik Depla (UGent) (2013) THIN SOLID FILMS. 531. p.32-41