Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "films" cql: author exact 000080318020 or (type exact bookEditor and editor exact 000080318020) Add to list Journal Article A1 Sputter yield measurements to evaluate the target state during reactive magnetron sputtering Roeland Schelfhout (UGent) , Koen Strijckmans (UGent) and Diederik Depla (UGent) (2020) SURFACE & COATINGS TECHNOLOGY. 399. Add to list Journal Article A1 Anomalous effects in the aluminum oxide sputtering yield Roeland Schelfhout (UGent) , Koen Strijckmans (UGent) and Diederik Depla (UGent) (2018) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 51(15). Add to list Journal Article A1 An X-ray photoelectron spectroscopy study of the target surface composition after reactive magnetron sputtering Roeland Schelfhout (UGent) , Koen Strijckmans (UGent) and Diederik Depla (UGent) (2018) SURFACE & COATINGS TECHNOLOGY. 353. p.231-236