Ghent University Academic Bibliography

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2013
- A1
- journalArticle
Ultra-low copper baths for sub-35 nm copper interconnects
Tanya Atanasova, L Carbonell, R Caluwaerts, Zs Tõkei, Katrien Strubbe UGent and PM Vereecken (2013) JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 160(12). p.3255-3259 Mark