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Controlled synthesis of Fe-Pt nanoalloys using atomic layer deposition
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- Journal Article
- A1
- open access
Investigating the nucleation of AlOx and HfOx ALD on polyimide : influence of plasma activation
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Plasma-enhanced atomic layer deposition : correlating O2 plasma parameters and species to blister formation and conformal film growth
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Atomic layer deposition on polymer thin films : on the role of precursor infiltration and reactivity
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In situ study of noble metal atomic layer deposition processes using grazing incidence small angle X-ray scattering
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Visualizing the nucleation of ALD on polymers
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Study of ALD barrier layers for the embedding of electronic and opto-electronic components in a smart microsystem in direct contact with the human body
(2020) -
- Journal Article
- A1
- open access
A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
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- Conference Paper
- C3
- open access
The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulation
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- Journal Article
- A1
- open access
Nucleation enhancement and area-selective atomic layer deposition of ruthenium using RuO4 and H2 gas