Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "STEP COVERAGE" Add to list Journal Article A1 open access Monte Carlo simulations of atomic layer deposition on 3D large surface area structures : required precursor exposure for pillar- versus hole-type structures VĂ©ronique Cremers (UGent) , Filip Geenen (UGent) , Christophe Detavernier (UGent) and Jolien Dendooven (UGent) (2017) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 35(1).