Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Save this search Download search results Subscribe to news feed Your filters: cql: keyword exact "PHYSICAL VAPOR-DEPOSITION" Add to list Journal Article A1 open access Conformality in atomic layer deposition : current status overview of analysis and modelling Véronique Cremers (UGent) , Riikka L Puurunen and Jolien Dendooven (UGent) (2019) APPLIED PHYSICS REVIEWS. 6(2). Add to list Journal Article A1 open access The target material influence on the current pulse during high power pulsed magnetron sputtering Filip Moens (UGent) , Stéphanos Konstantinidis and Diederik Depla (UGent) (2017) FRONTIERS IN PHYSICS. 5. Add to list Journal Article A1 Magnetron sputter deposition as visualized by Monte Carlo modeling Diederik Depla (UGent) and Wouter Leroy (UGent) (2012) THIN SOLID FILMS. 520(20). p.6337-6354 Add to list Journal Article A1 Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere Wouter Leroy (UGent) , Stephanos Konstantinidis, Stijn Mahieu (UGent) , Rony Snyders and Diederik Depla (UGent) (2011) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 44(11).