Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "Nano-wire sidewall defects" Add to list Conference Paper P1 A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies A. Vais, B. Hsu, O. Syshchyk, H. Yu, A. Alian, Y. Mols, V Kodandarama, K., B. Kunert, N. Waldron, Eddy Simoen (UGent) , et al. (2021) 2021 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS). In International Reliability Physics Symposium