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On the influence of local oxygen addition on the growth of sputter deposited yttrium oxide thin films
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The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films
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- Journal Article
- A1
- open access
Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films
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Reactive sputter deposition of Al doped TiOx thin films using titanium targets with aluminium inserts
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- Journal Article
- A1
- open access
The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering
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Deposition of thin films by sputtering cold isostatically pressed powder targets: a case study
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Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films
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- Journal Article
- A1
- open access
The fictional transition of the preferential orientation of yttria-stabilized zirconia thin films
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Magnetron sputter deposition as visualized by Monte Carlo modeling
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Smart textiles: an explorative study of the use of magnetron sputter deposition