Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "MEMS latching" Add to list Conference Paper P1 open access A bistable silicon photonic mems phase switch for nonvolatile photonic circuits Pierre Edinger, Alain Yuji Takabayashi, Carlos Errando-Herranz, Umar Khan (UGent) , Cleitus Antony, Giuseppe Talli, Peter Verheyen, Wim Bogaerts (UGent) , Niels Quack and Kristinn B. Gylfason (2022) 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS). In Proceedings IEEE Micro Electro Mechanical Systems p.995-997