Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "HF stability" Add to list Journal Article A1 UV cure of oxycarbosilane low-k films Murad Redzheb (UGent) , Lutz Prager, Mikhail Krishtab, Silvia Armini, Kris Vanstreels, Alexis Franquet, Pascal Van Der Voort (UGent) and Mikhail R Baklanov (2016) MICROELECTRONIC ENGINEERING. 156. p.103-107