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- Journal Article
- A1
- open access
Effect of processing conditions on residual stress in sputtered transition metal nitrides (TiN, ZrN and TaN) : experiments and modeling
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- Journal Article
- A1
- open access
Atomic layer deposition of ternary ruthenates by combining metalorganic precursors with RuO4 as the co-reactant
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Development of an active high-density transverse intrafascicular micro-electrode probe
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- Journal Article
- A2
- open access
Laser-induced vapor nanobubbles improve diffusion in biofilms of antimicrobial agents for wound care
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- Journal Article
- A1
- open access
Exploring light-sensitive nanocarriers for simultaneous triggered antibiotic release and disruption of biofilms upon generation of laser-induced vapor nanobubbles
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The effect of polyether suppressors on the nucleation and growth of copper on RuTa seeded substrate for direct copper plating
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The inhibition of enhanced Cu oxidation on ruthenium/diffusion barrier layers for Cu interconnects by carbon alloying into Ru
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The effect of sputtered W-based carbide diffusion barriers on the thermal stability and void formation in copper thin films
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Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N-2 or NH3 plasma