Ghent University Academic Bibliography

Journal Article
A1
open access

Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

Michiel Van Daele, Matthew BE Griffiths, Ali Raza, Matthias Minjauw (UGent) , Eduardo Solano, Ji-Yu Feng, Ranjith Karuparambil Ramachandran (UGent) , Stéphane Clemmen (UGent) , Roel Baets (UGent) , Seán T Barry, et al.

(2019) ACS APPLIED MATERIALS & INTERFACES. 11(40). p.37229-37238

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Journal Article
A1
open access

Plasma enhanced atomic layer deposition of gallium sulfide thin films

Jakob Kuhs (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)

(2019) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 37(2).

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In situ photoluminescence of colloidal quantum dots during gas exposure : the role of water and reactive atomic layer deposition precursors

Jakob Kuhs (UGent) , Andreas Werbrouck (UGent) , Natalia Klaudia Zawacka, Emile Drijvers, Philippe Smet (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)

(2019) ACS APPLIED MATERIALS & INTERFACES. 11(29). p.26277-26287

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Plasma enhanced atomic layer deposition of aluminum sulfide thin films

Jakob Kuhs (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)

(2018) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 36(1).

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Journal Article
A1
open access

Monte Carlo simulations of atomic layer deposition on 3D large surface area structures : required precursor exposure for pillar- versus hole-type structures

Véronique Cremers (UGent) , Filip Geenen (UGent) , Christophe Detavernier (UGent) and Jolien Dendooven (UGent)

(2017) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 35(1).

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Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Philippe Smet (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2014) ACS APPLIED MATERIALS & INTERFACES. 6(10). p.7316-7324

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Crystallization and semiconductor-metal switching behavior of thin VO₂ layers grown by atomic layer deposition

Geert Rampelberg (UGent) , Davy Deduytsche (UGent) , Bob De Schutter (UGent) , Peter Antony Premkumar, Michael Toeller, Marc Schaekers, Koen Martens, Iuliana Radu and Christophe Detavernier (UGent)

(2014) THIN SOLID FILMS. 550. p.59-64

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Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate

Jan Musschoot, Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , G Buyle and Christophe Detavernier (UGent)

(2012) SURFACE & COATINGS TECHNOLOGY. 206(22). p.4511-4517

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PhD Thesis
open access

Advantages and challenges of plasma enhanced atomic layer deposition

Jan Musschoot

(2011)

Academic Bibliography

Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

Plasma enhanced atomic layer deposition of gallium sulfide thin films

In situ photoluminescence of colloidal quantum dots during gas exposure : the role of water and reactive atomic layer deposition precursors

Plasma enhanced atomic layer deposition of aluminum sulfide thin films

Monte Carlo simulations of atomic layer deposition on 3D large surface area structures : required precursor exposure for pillar- versus hole-type structures

Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor

Crystallization and semiconductor-metal switching behavior of thin VO₂ layers grown by atomic layer deposition

Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate

Advantages and challenges of plasma enhanced atomic layer deposition

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