Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "COBALT PHOSPHATE" Add to list Journal Article A1 open access Atomic layer deposition of metal phosphates Lowie Henderick (UGent) , Arpan Dhara (UGent) , Andreas Werbrouck (UGent) , Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2022) APPLIED PHYSICS REVIEWS. 9(1).