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- Journal Article
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- open access
Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries
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- Journal Article
- A1
- open access
Atomic layer deposition of metal phosphates
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- Journal Article
- A1
- open access
Atomic layer deposition of nitrogen-doped Al phosphate coatings for Li-ion battery applications
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- Journal Article
- A1
- open access
Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma
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- Journal Article
- A1
- open access
Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
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Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
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Plasma-enhanced atomic layer deposition of zinc phosphate
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Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries