Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact F84E6C94-F0ED-11E1-A9DE-61C894A0A6B4 or (type any "bookEditor issueEditor" and edito... cql: keyword exact "ruthenium" Add to list PhD Thesis open access Advantages and challenges of plasma enhanced atomic layer deposition Jan Musschoot (2011) Add to list Journal Article A1 Texture of atomic layer deposited ruthenium Jan Musschoot, Qi Xie (UGent) , Davy Deduytsche (UGent) , Koen De Keyser, Delphine Longrie (UGent) , Johan Haemers (UGent) , Sven Van den Berghe, Roland Van Meirhaeghe, Jan D'Haen and Christophe Detavernier (UGent) (2010) MICROELECTRONIC ENGINEERING. 87(10). p.1879-1883