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Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films
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Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
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Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition
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Influence of Al content on the properties of MgO grown by reactive magnetron sputtering
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Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering: the method and results
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Magnetron sputter deposition: linking discharge voltage with target properties
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Scanning electron microscopy study of the growth mechanism of biaxially aligned magnesium oxide layers grown by unbalanced magnetron sputtering