Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact F667AC0C-8917-11E7-A29E-45B6AD28A064 or (type any "bookEditor journalEditor issueEdi... cql: keyword exact "pvd" Add to list Conference Paper C3 open access Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification Juan Santo-Domingo Peñaranda (UGent) , Mikko Nisula (UGent) , Sofie Vandenbroucke (UGent) , Matthias Minjauw (UGent) , Jin Li (UGent) , Andreas Werbrouck (UGent) , Jonas Keukelier (UGent) , Andrea Itziar Pitillas Martinez (UGent) , Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2021) AVS 21st International Conference on Atomic Layer Deposition (ALD 2021) , Abstracts.