Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact F373541E-F0ED-11E1-A9DE-61C894A0A6B4 cql: author exact 92629B08-B25E-11E6-B104-2D2FD0AF0289 Add to list Journal Article A1 Monte Carlo simulation of the transport of atoms in DC magnetron sputtering Stijn Mahieu (UGent) , Guy Buyle, Diederik Depla (UGent) , Sarah Heirwegh, Pieter Ghekiere and Roger De Gryse (UGent) (2006) NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. 243(2). p.313-319 Add to list Journal Article A1 Mechanism of preferential orientation in sputter deposited titanium nitride and yttria-stabilized zirconia layers Stijn Mahieu (UGent) , Pieter Ghekiere, Griet De Winter, Sarah Heirwegh, Diederik Depla (UGent) , Roger De Gryse (UGent) , OI LEBEDEV and G VAN TENDELOO (2005) JOURNAL OF CRYSTAL GROWTH. 279(1-2). p.100-109